Process endpoint detection in processing chambers

Details Process endpoint detection in processing chambers Process endpoint detection in processing chambers

2005-04-12

2005-04-12

Markoff, Alexander (Department: 1746)

Cleaning and liquid contact with solids

Processes

Combined

C134S022100, C134S022180, C438S905000

Reexamination Certificate

active

06878214

ABSTRACT:
Method and apparatus for determining an endpoint of a cleaning process running in a chamber. In particular, one embodiment of the present invention is a method that includes steps of: (a) directing radiation absorbed by a byproduct of the cleaning process into an exhaust line of the chamber; (b) detecting a measure of absorbance of the radiation by the byproduct; and (c) determining the endpoint when the measure of absorbance falls within a predetermined window.

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