Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2006-07-04
2006-07-04
Thomas, David B. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S285000, C451S526000, C204S22400M
Reexamination Certificate
active
07070475
ABSTRACT:
Aspects of the invention generally provide a method for polishing a material layer using electrochemical deposition techniques, electrochemical dissolution techniques, polishing techniques, and/or combinations thereof. In one aspect of the invention, the polishing method comprises applying a separate electrical bias, such as a voltage, to each of a plurality of zones of an electrode. Determining the separate biases comprises determining a time that at least one portion of the material layer is associated with each of the zones of the counter-electrode.
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Chen Liang-Yuh
Manens Antoine P.
Applied Materials
Patterson and Sheridan
Thomas David B.
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