Process chamber sleeve with ring seals for isolating individual

Details Process chamber sleeve with ring seals for isolating individual Process chamber sleeve with ring seals for isolating individual

1996-04-16

1997-09-16

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Multizone chamber

156345, 20429825, 20429835, C23C 1600

Patent

active

056675925

ABSTRACT:
A modular semiconductor wafer processing system comprises a plurality of detachable process reactors and other types of generators that can be attached to any of several ports on the lid of a circular wafer handling chamber. A multiple-spoke single-axis rigid-arm transfer carousel centrally located within the circular wafer handling chamber has access to the respective process areas beneath each port in the lid. A set of independent cylindrical sleeves with sealing rings are provided to rise up from the floor of the circular wafer handling chamber to contact and seal against the lid to isolate each of the process stations. The multiple-spoke single-axis rigid-arm transfer carousel is automatically positioned out of the way before the cylindrical rings are raised and sealed.

REFERENCES:
patent: 4715921 (1987-12-01), Maher et al.
patent: 4733631 (1988-03-01), Boyarsky
patent: 4830700 (1989-05-01), Davis et al.
patent: 4832778 (1989-05-01), Davis et al.
patent: 4906328 (1990-03-01), Freeman et al.
patent: 4915777 (1990-04-01), Jucha et al.
patent: 5019233 (1991-05-01), Blake
patent: 5076205 (1991-12-01), Vowles
patent: 5169478 (1992-12-01), Miyamoto et al.
patent: 5205919 (1993-04-01), Zejda
patent: 5281295 (1994-01-01), Maeda et al.
patent: 5281320 (1994-01-01), Turner et al.
patent: 5288379 (1994-02-01), Namiki
patent: 5292393 (1994-03-01), Maydan et al.
patent: 5302209 (1994-04-01), Maeda et al.
patent: 5308431 (1994-05-01), Maher et al.
patent: 5330633 (1994-07-01), Matsumoto
patent: 5364219 (1994-11-01), Takahashi
patent: 5376223 (1994-12-01), Salimian et al.

Affiliated with

Also associated with

Rating

Process chamber sleeve with ring seals for isolating individual does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process chamber sleeve with ring seals for isolating individual , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process chamber sleeve with ring seals for isolating individual will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-215154