4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Steve Egbert

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Modular process system

Material or article handling – Apparatus for charging a load holding or supporting element... – With simultaneous charging and discharging of plural load...
Patent

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Process chamber sleeve with ring seals for isolating individual

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Semiconductor wafer processing carousel

Material or article handling – Apparatus for charging a load holding or supporting element... – With simultaneous charging and discharging of plural load...
Patent

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Profile ID: LFUS-PAI-P-390242

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