Stock material or miscellaneous articles – Structurally defined web or sheet – Physical dimension specified
Reexamination Certificate
2004-11-24
2009-08-25
Mcneil, Jennifer (Department: 1794)
Stock material or miscellaneous articles
Structurally defined web or sheet
Physical dimension specified
C428S212000, C428S218000, C428S316600, C428S318400, C118S7230AN, C204S298010
Reexamination Certificate
active
07579067
ABSTRACT:
A substrate processing chamber component is capable of being exposed to an energized gas in a process chamber. The component has an underlying structure and first and second coating layers. The first coating layer is formed over the underlying structure, and has a first surface with an average surface roughness of less than about 25 micrometers. The second coating layer is formed over the first coating layer, and has a second surface with an average surface roughness of at least about 50 micrometers. Process residues can adhere to the surface of the second coating layer to reduce the contamination of processed substrates.
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Lin Yixing
Stow Clifford
Xu Dajiang
Applied Materials Inc.
Janah & Associates P.C.
Mcneil Jennifer
Savage Jason L
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