Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
Patent
1986-07-03
1989-11-07
Rosenberger, Richard A.
Optics: measuring and testing
By configuration comparison
With photosensitive film or plate
356357, 427 10, G01B 1106
Patent
active
048787558
ABSTRACT:
Process for measuring the optical properties of thin layers while they are being built up in vacuum coating installations. For this purpose, at least one test object is passed through a stationary measuring light beam and the transmission behavior of the test object is evaluated by measurement. A reference point for the measurements is fixed in each case by reference measurements at intervals of time. In addition, at least one opaque measurement zone and at least one measuring zone, which does not attenuate the measuring light beam, are disposed in path of motion of the test object. The ratio of the measured value of the test object, decreased by the measured value of the opaque measuring zone, to the measured value of the nonattenuating measuring zone, decreased by the measured value of the opaque measuring zone, is formed by an arithmetic logic unit.
REFERENCES:
patent: 3737237 (1973-06-01), Zuvasky
patent: 4566798 (1986-01-01), Haas
Schwiecker Horst
Siegmund Hans-Joachim
Leybold Aktiengesellschaft
Rosenberger Richard A.
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