Process and apparatus for plasma-activated electron beam vaporiz

Details Process and apparatus for plasma-activated electron beam vaporiz Process and apparatus for plasma-activated electron beam vaporiz

1996-04-29

1997-03-25

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

118 501, 118620, 118723E, 118723EB, 118723FE, 4272481, 427294, 427580, 427585, 427595, H05H 124

Patent

active

056142730

ABSTRACT:
A process and apparatus for plasma-activated electron beam vaporization is rovided. The vaporizing material from at least two vaporizer crucibles is vaporized with electron beams. An electric voltage is applied to the vaporizer crucibles in such a way that the vapor-emitting areas serve as electrodes of an electric discharge. The vaporizing material acts as a cathode or anode. The process and apparatus are preferably intended for the reactive coating of large surfaces and for the reactive coating of components, tools and strip steel.

REFERENCES:
patent: 3791852 (1974-02-01), Bunshah
patent: 4673477 (1987-06-01), Ramalingam et al.
patent: 5227203 (1993-07-01), Kibe et al.
Japanese Absract No. 63-20465, vol. 12, No. 223 (C-507), Jan. 28, 1988.

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