Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2008-05-13
2008-05-13
Raevis, Robert (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
07370515
ABSTRACT:
Probes for use in a scanning probe microscope and methods of manufacturing such probes. Each probe includes a probe tip having a substantially vertical sidewall formed by an anisotropic etching process and a flared post underlying the probe tip that is formed by an etching process that is not anisotropic. A source gas comprising a bromine-containing gas and an oxygen-containing gas is used to etch the probe tip and flared post of the probe in a batch process. The probe tips may be qualified using any suitable criterion for use by a customer in an atomic force microscope without individual inspection.
REFERENCES:
patent: 4104549 (1978-08-01), Akimoto et al.
patent: 4968585 (1990-11-01), Albrecht et al.
patent: 5043693 (1991-08-01), Edelstein
patent: 5116462 (1992-05-01), Bartha et al.
patent: 5242541 (1993-09-01), Bayer et al.
patent: 5302239 (1994-04-01), Roe et al.
patent: 5382795 (1995-01-01), Bayer et al.
patent: 5883387 (1999-03-01), Matsuyama et al.
patent: 6066265 (2000-05-01), Galvin et al.
patent: 6091124 (2000-07-01), Bayer et al.
patent: 6339217 (2002-01-01), Kley
patent: 6386217 (2002-05-01), Cooper et al.
patent: 6504152 (2003-01-01), Hantschel et al.
patent: 6583412 (2003-06-01), Williams
patent: 6694805 (2004-02-01), Shiotani et al.
patent: 6705154 (2004-03-01), Nakayama et al.
patent: 6817231 (2004-11-01), Yasutake et al.
patent: 6832508 (2004-12-01), Prakash
patent: 2005/0003518 (2005-01-01), Aviram et al.
patent: 0413040 (1991-02-01), None
patent: 0483579 (1992-05-01), None
patent: WO99/58925 (1999-11-01), None
Ronald Dixson et al.,Implementation of a Reference Measurement System Using CD-AFM, Proceedings of SPIE vol. 5038, pp. 150-165 (2003).
Chand Ami
Okulan Nihat
Raevis Robert
Veeco Instruments Inc.
Wood Herron & Evans LLP
LandOfFree
Probes for use in scanning probe microscopes and methods of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Probes for use in scanning probe microscopes and methods of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Probes for use in scanning probe microscopes and methods of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2808580