Probe scanning device

Details Probe scanning device Probe scanning device

1998-01-30

2000-04-18

Westin, Edward P.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 73105, H01J 3700, G01B 528

Patent

active

060518332

ABSTRACT:
A spindle scans a scanner unit comprising a slender tube portion, a thick tube portion and the like in x and y directions by receiving power from a movable member of a voice coil motor. A mechanical zoom switch is provided with a metal having a low melting point at inside thereof and connects a spring for zoom to the spindle when the metal is solidified. Therefore, the spring constant of the spring for zoom is added to the spring constant of the slender tube portion whereby zoom operation is caused. Meanwhile, when heat is applied from a heating coil to the switch, the metal having a low melting point is softened and the spring for zoom is separated from the spindle. Since the metal having a low melting point is used for the switch, the switch can be switched swiftly and the operational performance of the zoom mechanism is improved.

REFERENCES:
patent: 5808302 (1998-09-01), Binnig et al.

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