Probe scanning apparatus

Details Probe scanning apparatus Probe scanning apparatus

1997-05-13

2000-06-20

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, H01J 3700

Patent

active

060780444

ABSTRACT:
A probe scanning apparatus for use in a device for measuring the shape of a surface or the physical properties of a sample comprises a probe and voice coil motors for generating a moving force for moving the probe in each of three directions x, y and z upon activation of the voice coil motors. A probe supporting mechanism is mounted for movement in the three directions x, y and z by the moving forces generated by the voice coil motors upon activation thereof to effect coarse/fine movement of the probe in the direction z and to scan the probe in the directions x and y.

REFERENCES:
patent: 5201392 (1993-04-01), Kramer
patent: 5223713 (1993-06-01), Uozumi et al.
patent: 5276545 (1994-01-01), Daun et al.
patent: 5410910 (1995-05-01), Somlyo et al.
patent: 5513518 (1996-05-01), Lindsay
patent: 5672816 (1997-09-01), Park et al.
patent: 5808302 (1998-09-01), Binnig et al.
Review of Scientific Instruments, vol. 64, No. 11, Nov. 1, 1993, pp. 2153-2156, D. N. Davydov et al., "Cryogenic Scanning Tunneling Microscope With A Magnetic Coarse Approach".

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