Probe for scanning probe microscope

Details Probe for scanning probe microscope Probe for scanning probe microscope

2005-03-08

2005-03-08

Font, Frank G. (Department: 2883)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S309000, C250S310000, C250S311000

Reexamination Certificate

active

06864481

ABSTRACT:
A probe for a scanning probe microscope has a cantilever portion and a microscopic probe portion formed of a solid columnar tip at a distal end of the cantilever portion by deposition using an organic gas decomposed by a focused ion beam inside a vacuum chamber. The probe is sufficiently narrow and has high abrasion resistance and rigidity. The tip may be grown to extend from the cantilever portion at an angle shifted by an angle at which the cantilever portion is inclined during scanning of the probe portion across a sample surface, so that the columnar tip is perpendicular to the sample surface during the scanning. The tip may be formed of a conductive material such as tungsten of diamond-like carbon by FIB-CVD.

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