Scanning-probe techniques or apparatus; applications of scanning – General aspects of spm probes – their manufacture – or their... – Probe manufacture
Reexamination Certificate
2007-08-02
2010-10-26
Noland, Thomas P (Department: 2856)
Scanning-probe techniques or apparatus; applications of scanning
General aspects of spm probes, their manufacture, or their...
Probe manufacture
Reexamination Certificate
active
07823216
ABSTRACT:
A method of producing a probe device for a metrology instrument such as an AFM includes providing a substrate having front and back surfaces and then forming an array of tip height structures on the first surface of the substrate, the structures having varying depths corresponding to selectable tip heights. The back surface of the substrate is etched until a thickness of the substrate substantially corresponds to a selected tip height, preferably by monitoring this etch visually and/or monitoring the etch rate. The tips are patterned from the front side of the wafer relative to fixed ends of the cantilevers, and then etched using an anisotropic etch. As a result, probe devices having sharp tips and short cantilevers exhibit fundamental resonant frequencies greater than 700 kHz or more.
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Fan Wenjun
Nagle Steven F.
Boyle Fredrickson , S.C.
Noland Thomas P
Veeco Instruments Inc.
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