4. Electrical generator or motor structure
  5. Dynamoelectric
  6. Rotary

Steven F. Nagle

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MEMS membrane with integral mirror/lens

Coherent light generators – Particular active media – Semiconductor
Reexamination Certificate

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Microturbomachinery

Electrical generator or motor structure – Dynamoelectric – Rotary
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Microturbomachinery

Prime-mover dynamo plants – Turbogenerators
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Probe device for a metrology instrument and method of...

Scanning-probe techniques or apparatus; applications of scanning – General aspects of spm probes – their manufacture – or their... – Probe manufacture
Reexamination Certificate

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Process for fabricating MEMS membrane with integral mirror/lens

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
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Profile ID: LFUS-PAI-P-1047016

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