Probe array for a scanning probe microscope

Details Probe array for a scanning probe microscope Probe array for a scanning probe microscope

1998-01-21

1999-11-16

Westin, Edward P.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 73105, H01J 3700, G01B 528

Patent

active

059862629

ABSTRACT:
A probe array for a scanning microscope has numerous individual probes that respectively have a probe tip on one or more beams. The individual probes are arranged in the form of a two-dimensional grid such that the directions of the beams include with respect to the directions of the grid an angle which is not equal to 0.degree. or 180.degree.. The grid spacings in both mutually perpendicular directions can be smaller than the length of the beams, due to the inclined arrangement of the beams relative to the translation vectors of the grid formed by the probe tips (3a-3p). The two beams (4a, 5a) of each individual probe are mutually arranged in a V-shape to form a mutually nested arrangement of the individual probes.

REFERENCES:
patent: 5015850 (1991-05-01), Zdeblick et al.
patent: 5036490 (1991-07-01), Kajimura et al.
patent: 5053995 (1991-10-01), Kajimura et al.
patent: 5294790 (1994-03-01), Ohta et al.
patent: 5360978 (1994-11-01), Gueret
patent: 5461907 (1995-10-01), Tench et al.
patent: 5517280 (1996-05-01), Quate

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