4. Radiant energy
  5. Inspection of solids or liquids by charged particles

Martin Volcker

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Ancillary module for making a spatially-resolved measurement of

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
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Probe array for a scanning probe microscope

Radiant energy – Inspection of solids or liquids by charged particles
Patent

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Profile ID: LFUS-PAI-P-1395496

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