Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate
2009-04-15
2011-10-25
Choi, Jacob Y (Department: 2821)
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Plasma generating
Reexamination Certificate
active
08044594
ABSTRACT:
One embodiment comprises a plasma processing system having a plasma chamber, a generator, a feedback component, and a controller. The feedback component is adapted to receive at least one first signal having a level dependent upon the power signal supplied from the generator to the chamber. A feedback output is adapted to emit a second signal to the controller, which is adapted to supply a third signal to the power generator. The third signal is configured to control the power generator to supply the power signal at a power level for a particular processing application. The power generator is further controlled by the controller to one of reduce and remove power from the plasma processing chamber and subsequently increase the voltage level until the power level reaches a threshold level. The power generator is further controlled to subsequently modulate the voltage until the voltage returns to a first voltage level.
REFERENCES:
patent: 3867669 (1975-02-01), Krasik et al.
patent: 4271369 (1981-06-01), Stillwagon
patent: 4276507 (1981-06-01), Stillwagon
patent: 4299678 (1981-11-01), Meckel
patent: 4428023 (1984-01-01), Maier
patent: 4459629 (1984-07-01), Titus
patent: 4484243 (1984-11-01), Herbst et al.
patent: 4540607 (1985-09-01), Tsao
patent: 4557819 (1985-12-01), Meacham et al.
patent: 4585986 (1986-04-01), Dyer
patent: 4589123 (1986-05-01), Pearlman et al.
patent: 4740858 (1988-04-01), Yamaguchi et al.
patent: 4792730 (1988-12-01), Mintchev et al.
patent: 4870529 (1989-09-01), Powell et al.
patent: 4871421 (1989-10-01), Ogle et al.
patent: 4901621 (1990-02-01), Tidman
patent: 4936960 (1990-06-01), Siefkes et al.
patent: 4999760 (1991-03-01), Tietema
patent: 5192894 (1993-03-01), Teschner
patent: 5241152 (1993-08-01), Anderson et al.
patent: 5275083 (1994-01-01), Hawke et al.
patent: 5281321 (1994-01-01), Sturmer et al.
patent: 5286360 (1994-02-01), Szczyrbowski
patent: 5303139 (1994-04-01), Mark
patent: 5307004 (1994-04-01), Carsten
patent: 5377218 (1994-12-01), Guenther
patent: 5415757 (1995-05-01), Szczyrbowski et al.
patent: 5418707 (1995-05-01), Shimer et al.
patent: 5427669 (1995-06-01), Drummond
patent: 5488535 (1996-01-01), Masghati et al.
patent: 5517085 (1996-05-01), Engemann et al.
patent: 5535906 (1996-07-01), Drummond
patent: 5576939 (1996-11-01), Drummond
patent: 5584972 (1996-12-01), Lantsman
patent: 5584974 (1996-12-01), Sellers
patent: 5616224 (1997-04-01), Boling
patent: 5645698 (1997-07-01), Okano
patent: 5651865 (1997-07-01), Sellers
patent: 5682067 (1997-10-01), Manley et al.
patent: 5698082 (1997-12-01), Teschner et al.
patent: 5708250 (1998-01-01), Benjamin et al.
patent: 5718813 (1998-02-01), Drummond et al.
patent: 5725675 (1998-03-01), Fong et al.
patent: 5731565 (1998-03-01), Gates
patent: 5750971 (1998-05-01), Taylor
patent: 5814195 (1998-09-01), Lehan et al.
patent: 5815388 (1998-09-01), Manley et al.
patent: 5851365 (1998-12-01), Scobey
patent: 5855745 (1999-01-01), Manley
patent: 5882492 (1999-03-01), Manley et al.
patent: 5917286 (1999-06-01), Scholl et al.
patent: 6001224 (1999-12-01), Drummond
patent: 6005218 (1999-12-01), Walde et al.
patent: 6024844 (2000-02-01), Drummond et al.
patent: 6046641 (2000-04-01), Chawla
patent: 6080292 (2000-06-01), Matsuzawa et al.
patent: 6135998 (2000-10-01), Palanker
patent: 6161332 (2000-12-01), Avot
patent: 6162332 (2000-12-01), Chiu
patent: 6174450 (2001-01-01), Patrick et al.
patent: 6176979 (2001-01-01), Signer et al.
patent: 6222321 (2001-04-01), Scholl et al.
patent: 6238513 (2001-05-01), Arnold et al.
patent: 6321531 (2001-11-01), Caren et al.
patent: 6365009 (2002-04-01), Ishibashi
patent: 6416638 (2002-07-01), Kuriyama et al.
patent: 6433987 (2002-08-01), Liptak
patent: 6440281 (2002-08-01), Sturmer
patent: 6447655 (2002-09-01), Lantsman
patent: 6447719 (2002-09-01), Agamohamadi et al.
patent: 6472822 (2002-10-01), Chen et al.
patent: 6484707 (2002-11-01), Frus et al.
patent: 6507155 (2003-01-01), Barnes et al.
patent: 6522076 (2003-02-01), Goedicke et al.
patent: 6524455 (2003-02-01), Sellers
patent: 6552295 (2003-04-01), Markunas et al.
patent: 6621674 (2003-09-01), Zahringer et al.
patent: 6636545 (2003-10-01), Krasnov
patent: 6736944 (2004-05-01), Buda
patent: 6817388 (2004-11-01), Tsangaris
patent: 6878248 (2005-04-01), Signer et al.
patent: 6943317 (2005-09-01), Ilic et al.
patent: 6967305 (2005-11-01), Sellers
patent: 7081598 (2006-07-01), Ilic et al.
patent: 7169256 (2007-01-01), Dhindsa et al.
patent: 7179987 (2007-02-01), Farth et al.
patent: 7247218 (2007-07-01), Hoffman
patent: 7305311 (2007-12-01), Van Zyl
patent: 7345428 (2008-03-01), Turner
patent: 7445695 (2008-11-01), Ilic et al.
patent: 7471047 (2008-12-01), Ogawa
patent: 7498908 (2009-03-01), Gurov
patent: 7503996 (2009-03-01), Chen et al.
patent: 7514935 (2009-04-01), Pankratz
patent: 7615931 (2009-11-01), Hooke et al.
patent: 7651492 (2010-01-01), Wham
patent: 2002/0170678 (2002-11-01), Hayashi et al.
patent: 2003/0192475 (2003-10-01), Shannon et al.
patent: 2003/0205460 (2003-11-01), Buda
patent: 2003/0205557 (2003-11-01), Benjamin et al.
patent: 2004/0026235 (2004-02-01), Stowell, Jr.
patent: 2004/0027209 (2004-02-01), Chen et al.
patent: 2004/0182697 (2004-09-01), Buda
patent: 2004/0191950 (2004-09-01), Nakamura et al.
patent: 2004/0226657 (2004-11-01), Hoffman
patent: 2004/0245999 (2004-12-01), Walde et al.
patent: 2005/0035770 (2005-02-01), Hopkins et al.
patent: 2005/0040144 (2005-02-01), Sellers
patent: 2005/0092596 (2005-05-01), Kouznetsov
patent: 2005/0258148 (2005-11-01), Condrashoff
patent: 2005/0264218 (2005-12-01), Dhindsa et al.
patent: 2006/0011591 (2006-01-01), Sellers
patent: 2006/0049831 (2006-03-01), Anwar et al.
patent: 2006/0054601 (2006-03-01), Ilic et al.
patent: 2006/0057854 (2006-03-01), Setsuhara et al.
patent: 2006/0066248 (2006-03-01), Chistyakov
patent: 2006/0189168 (2006-08-01), Sato et al.
patent: 2006/0214599 (2006-09-01), Ogawa
patent: 2006/0241879 (2006-10-01), Van Zyl
patent: 2006/0252283 (2006-11-01), Takeda et al.
patent: 2006/0278608 (2006-12-01), Hoffman
patent: 2007/0008034 (2007-01-01), Tayrani
patent: 2007/0042131 (2007-02-01), Soo et al.
patent: 2007/0080903 (2007-04-01), Lee
patent: 2007/0139122 (2007-06-01), Nagarkatti et al.
patent: 2008/0061794 (2008-03-01), Pankratz
patent: 2008/0122369 (2008-05-01), Nitschke
patent: 2008/0156632 (2008-07-01), Van Zyl
patent: 2008/0203070 (2008-08-01), Illic et al.
patent: 2009/0206822 (2009-08-01), Coumou
patent: 2010/0026186 (2010-02-01), Forest et al.
patent: 2011/0011730 (2011-01-01), Valcore et al.
patent: WO2006014212 (2006-02-01), None
patent: WO2006023847 (2006-03-01), None
patent: WO2008033968 (2008-03-01), None
Young, Lee W., “PCT International Search Report re Application No. PCT/US08/054056”, Jun. 25, 2008, Published in: PCT.
Kolev, Vesselin, “PCT International Search Report re Application No. PCT/US09/066899”, Feb. 19, 2010, Published in: PCT.
Kim, Ki Wan, “PCT International Search Report re Application No. PCT/US09/051174”, Feb. 24, 2010, Publisher: PCT, Published in: PCT.
Frost Daryl
Heine Frank
Morgan Forrest
Pelleymounter Doug
Walde Hendrik
Advanced Energy Industries Inc.
Arpin Anthony
Choi Jacob Y
Neugeboren O'Dowd PC
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