Power loss recovery for wafer heater

Details Power loss recovery for wafer heater Power loss recovery for wafer heater

1994-02-24

1995-06-06

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118728, C23C 1602

Patent

active

054218942

ABSTRACT:
A pneumatic air cylinder having a normally open solenoid valve provides emergency recovery power to a wafer heater assembly during interruption of an electric power supply. The wafer heater assembly includes a well formed in an upper surface that is adapted to receive and align a wafer during wafer processing. During normal operating conditions, the air cylinder is out of the way of the motion of an electric motor that drives the wafer heater assembly. In the event that the electric power is interrupted, the normally open valve is opened, allowing air to operate the cylinder, drive the heater assembly down, and move the wafer out of the heater well before the heater assembly cools sufficiently to contract and break the wafer. When electric power is resumed, the air supply to the air cylinder is shut off, and the heater is rehomed by the electric motor. Such procedure unlatches a system command to allow the electric motor to position the pneumatic cylinder for future operation.

REFERENCES:
patent: 3967132 (1976-06-01), Takamine

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