Power device with trenches having wider upper portion than...

Details Power device with trenches having wider upper portion than... Power device with trenches having wider upper portion than...

2010-09-16

2011-10-11

Tran, Long (Department: 2829)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S259000, C438S270000, C438S561000, C257SE21549, C257SE27091, C257SE29257, C257SE29260

Reexamination Certificate

active

08034682

ABSTRACT:
A method of forming a semiconductor device includes the following. Removing portions of a silicon layer such that a trench having sidewalls which fan out near the top of the trench to extend directly over a portion of the silicon layer is formed in the silicon layer; and forming source regions in the silicon layer adjacent the trench sidewall such that the source regions extend into the portions of the silicon layer directly over which the trench sidewalls extend.

REFERENCES:
patent: 3404295 (1968-10-01), Warner et al.
patent: 3412297 (1968-11-01), Amlinger
patent: 3497777 (1970-02-01), Teszner et al.
patent: 3564356 (1971-02-01), Wilson
patent: 4003072 (1977-01-01), Matsushita et al.
patent: 4300150 (1981-11-01), Colak
patent: 4326332 (1982-04-01), Kenney et al.
patent: 4337474 (1982-06-01), Yukimoto
patent: 4579621 (1986-04-01), Hine
patent: 4636281 (1987-01-01), Buiguez et al.
patent: 4638344 (1987-01-01), Cardwell, Jr.
patent: 4639761 (1987-01-01), Singer et al.
patent: 4698653 (1987-10-01), Cardwell, Jr.
patent: 4716126 (1987-12-01), Cogan
patent: 4746630 (1988-05-01), Hui et al.
patent: 4754310 (1988-06-01), Coe
patent: 4774556 (1988-09-01), Fujii et al.
patent: 4801986 (1989-01-01), Chang et al.
patent: 4821095 (1989-04-01), Temple
patent: 4823176 (1989-04-01), Baliga et al.
patent: 4853345 (1989-08-01), Himelick
patent: 4868624 (1989-09-01), Grung et al.
patent: 4893160 (1990-01-01), Blanchard
patent: 4914058 (1990-04-01), Blanchard
patent: 4941026 (1990-07-01), Temple
patent: 4967245 (1990-10-01), Cogan et al.
patent: 4974059 (1990-11-01), Kinzer
patent: 4990463 (1991-02-01), Mori
patent: 4992390 (1991-02-01), Chang
patent: 5027180 (1991-06-01), Nishizawa et al.
patent: 5071782 (1991-12-01), Mori
patent: 5072266 (1991-12-01), Bulucea et al.
patent: 5079608 (1992-01-01), Wodarczyk et al.
patent: 5105243 (1992-04-01), Nakagawa et al.
patent: 5142640 (1992-08-01), Iwanatsu
patent: 5164325 (1992-11-01), Cogan et al.
patent: 5164802 (1992-11-01), Jones et al.
patent: 5216275 (1993-06-01), Chen
patent: 5219777 (1993-06-01), Kang
patent: 5219793 (1993-06-01), Cooper et al.
patent: 5233215 (1993-08-01), Baliga
patent: 5262336 (1993-11-01), Pike, Jr. et al.
patent: 5268311 (1993-12-01), Euen et al.
patent: 5275965 (1994-01-01), Manning
patent: 5283201 (1994-02-01), Tsang et al.
patent: 5294824 (1994-03-01), Okada
patent: 5298761 (1994-03-01), Aoki et al.
patent: 5298781 (1994-03-01), Cogan et al.
patent: 5300447 (1994-04-01), Anderson
patent: 5326711 (1994-07-01), Malhi
patent: 5350937 (1994-09-01), Yamazaki et al.
patent: 5365102 (1994-11-01), Mehrotra et al.
patent: 5366914 (1994-11-01), Takahashi et al.
patent: 5389815 (1995-02-01), Takahashi
patent: 5405794 (1995-04-01), Kim
patent: 5418376 (1995-05-01), Muraoka et al.
patent: 5424231 (1995-06-01), Yang
patent: 5429977 (1995-07-01), Lu et al.
patent: 5430311 (1995-07-01), Murakami et al.
patent: 5430324 (1995-07-01), Bencuya
patent: 5434435 (1995-07-01), Baliga
patent: 5436189 (1995-07-01), Beasom
patent: 5438215 (1995-08-01), Tihanyi
patent: 5442214 (1995-08-01), Yang
patent: 5473176 (1995-12-01), Kakumoto
patent: 5473180 (1995-12-01), Ludikhuize
patent: 5474943 (1995-12-01), Hshieh et al.
patent: 5519245 (1996-05-01), Tokura et al.
patent: 5532179 (1996-07-01), Chang et al.
patent: 5541425 (1996-07-01), Nishihara
patent: 5554862 (1996-09-01), Omura et al.
patent: 5567634 (1996-10-01), Hebert et al.
patent: 5567635 (1996-10-01), Acovic et al.
patent: 5572048 (1996-11-01), Sugawara
patent: 5576245 (1996-11-01), Cogan et al.
patent: 5578851 (1996-11-01), Hshieh et al.
patent: 5581100 (1996-12-01), Ajit
patent: 5583065 (1996-12-01), Miwa
patent: 5592005 (1997-01-01), Floyd et al.
patent: 5595927 (1997-01-01), Chen et al.
patent: 5597765 (1997-01-01), Yilmaz et al.
patent: 5605852 (1997-02-01), Bencuya
patent: 5623152 (1997-04-01), Majumdar et al.
patent: 5629543 (1997-05-01), Hshieh et al.
patent: 5637898 (1997-06-01), Baliga
patent: 5639676 (1997-06-01), Hshieh et al.
patent: 5640034 (1997-06-01), Malhi
patent: 5648670 (1997-07-01), Blanchard
patent: 5656843 (1997-08-01), Goodyear et al.
patent: 5665619 (1997-09-01), Kwan et al.
patent: 5670803 (1997-09-01), Beilstein, Jr. et al.
patent: 5689128 (1997-11-01), Hshieh et al.
patent: 5693569 (1997-12-01), Ueno
patent: 5705409 (1998-01-01), Witek
patent: 5710072 (1998-01-01), Krautschneider et al.
patent: 5714781 (1998-02-01), Yamamoto et al.
patent: 5719409 (1998-02-01), Singh et al.
patent: 5770878 (1998-06-01), Beasom
patent: 5776813 (1998-07-01), Huang et al.
patent: 5780343 (1998-07-01), Bashir
patent: 5801417 (1998-09-01), Tsang et al.
patent: 5877528 (1999-03-01), So
patent: 5879971 (1999-03-01), Witek
patent: 5879994 (1999-03-01), Kwan et al.
patent: 5895951 (1999-04-01), So et al.
patent: 5895952 (1999-04-01), Darwish et al.
patent: 5897343 (1999-04-01), Mathew et al.
patent: 5897360 (1999-04-01), Kawaguchi
patent: 5900663 (1999-05-01), Johnson et al.
patent: 5906680 (1999-05-01), Meyerson
patent: 5917216 (1999-06-01), Floyd et al.
patent: 5929481 (1999-07-01), Hsieh et al.
patent: 5943581 (1999-08-01), Lu et al.
patent: 5949104 (1999-09-01), D'Anna et al.
patent: 5949124 (1999-09-01), Hadizad et al.
patent: 5959324 (1999-09-01), Kohyama
patent: 5960271 (1999-09-01), Wollesen et al.
patent: 5972741 (1999-10-01), Kubo et al.
patent: 5973360 (1999-10-01), Tihanyi
patent: 5976936 (1999-11-01), Miyajima et al.
patent: 5981344 (1999-11-01), Hshieh et al.
patent: 5981996 (1999-11-01), Fujishima
patent: 5998833 (1999-12-01), Baliga
patent: 6005271 (1999-12-01), Hshieh
patent: 6008097 (1999-12-01), Yoon et al.
patent: 6011298 (2000-01-01), Blanchard
patent: 6015727 (2000-01-01), Wanlass
patent: 6020250 (2000-02-01), Kenny et al.
patent: 6034415 (2000-03-01), Johnson et al.
patent: 6037202 (2000-03-01), Witek
patent: 6037628 (2000-03-01), Huang
patent: 6037632 (2000-03-01), Omura et al.
patent: 6040600 (2000-03-01), Uenishi et al.
patent: 6048772 (2000-04-01), D'Anna
patent: 6049108 (2000-04-01), Williams et al.
patent: 6057558 (2000-05-01), Yamamoto et al.
patent: 6063678 (2000-05-01), D'Anna
patent: 6064088 (2000-05-01), D'Anna
patent: 6066878 (2000-05-01), Neilson
patent: 6077733 (2000-06-01), Chen et al.
patent: 6081009 (2000-06-01), Neilson
patent: 6084264 (2000-07-01), Darwish
patent: 6084268 (2000-07-01), de Frésart et al.
patent: 6087232 (2000-07-01), Kim et al.
patent: 6096608 (2000-08-01), Williams
patent: 6097063 (2000-08-01), Fujihira
patent: 6103578 (2000-08-01), Uenishi et al.
patent: 6103619 (2000-08-01), Lai
patent: 6104054 (2000-08-01), Corsi et al.
patent: 6110799 (2000-08-01), Huang
patent: 6114727 (2000-09-01), Ogura et al.
patent: 6137135 (2000-10-01), Kubo et al.
patent: 6137152 (2000-10-01), Wu
patent: 6156606 (2000-12-01), Michaelis
patent: 6156611 (2000-12-01), Lan et al.
patent: 6163052 (2000-12-01), Liu et al.
patent: 6165870 (2000-12-01), Shim et al.
patent: 6168983 (2001-01-01), Rumennik et al.
patent: 6168996 (2001-01-01), Numazawa et al.
patent: 6171935 (2001-01-01), Nance et al.
patent: 6174769 (2001-01-01), Lou
patent: 6174773 (2001-01-01), Fujishima
patent: 6174785 (2001-01-01), Parekh et al.
patent: 6184545 (2001-02-01), Werner et al.
patent: 6184555 (2001-02-01), Tihanyi et al.
patent: 6188104 (2001-02-01), Choi et al.
patent: 6188105 (2001-02-01), Kocon et al.
patent: 6190978 (2001-02-01), D'Anna
patent: 6191447 (2001-02-01), Baliga
patent: 6198127 (2001-03-01), Kocon
patent: 6201279 (2001-03-01), Pfirsch
patent: 6204097 (2001-03-01), Shen et al.
patent: 6207994 (2001-03-01), Rumennik et al.
patent: 6222233 (2001-04-01), D'Anna
patent: 6225649 (2001-05-01), Minato
patent: 6228727 (2001-05-01), Lim et al.
patent: 6229465 (2001-05-01), Bulaga et al.
patent: 6239348 (2001-05-01), Metcalf
patent: 6239464 (2001-05-01), Tsuchitani et al.
patent: 6265269 (2001-07-01), Chen et al.
patent: 6271082 (2001-08-01), Hou et al.
patent: 6271100 (2001-08-01), Ballantine et al.
patent: 6271552 (2001-08-01), D'Anna
patent: 6271562 (2001-08-01), Deboy et al.
patent: 6274905 (2001-08-01), Mo
patent: 6277706 (2001-08-01), Ishikawa
patent: 6285060 (2001-09-0

Affiliated with

Also associated with

Rating

Power device with trenches having wider upper portion than... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Power device with trenches having wider upper portion than..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Power device with trenches having wider upper portion than... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4292614