Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2007-10-22
2010-11-02
Hamilton, Cynthia (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S288100, C430S271100, C430S914000, C430S311000, C430S326000, C430S330000, C430S327000, C438S952000
Reexamination Certificate
active
07824837
ABSTRACT:
The present invention relates to a positive bottom photoimageable antireflective coating composition which is capable of being developed in an aqueous alkaline developer, wherein the antireflective coating composition comprises a polymer comprising at least one recurring unit with a chromophore group and one recurring unit with a hydroxyl and/or a carboxyl group, a vinyl ether terminated crosslinking agent, and optionally, a photoacid generator and/or an acid and/or a thermal acid generator. The invention further relates to a process for using such a composition.
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Ding-Lee Shuji S
Hishida Aritaka
Neisser Mark O.
Oberlander Joseph E.
Toukhy Medhat E.
AZ Electronic Materials USA Corp.
Hamilton Cynthia
Jain Sangya
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