Joseph E. Oberlander

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Antireflective coating material for photoresists

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Antireflective composition for a deep ultraviolet photoresist

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Antireflective compositions for photoresists

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Composition for stripping photoresist and organic materials...

Cleaning and liquid contact with solids – Processes – Oils – grease – tar – or wax removal – by dissolving
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Edge bead remover for thick film photoresists

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Processing feature prior to imaging
Reexamination Certificate

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Profile ID: LFUS-PAI-P-647353

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