Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Patent
1993-10-12
1994-07-12
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Electron beam imaging
430165, 430191, 430326, 430331, G03F 730, G03F 7023
Patent
active
053288068
ABSTRACT:
A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one dimeric or trimeric unit formed by the condensation reaction of an aldehyde with sesamol; the amount of said binder resin being about 60 to 95% by weight, the amount 40% of said photoactive component being about 5% to about by weight, based on the total solids content of said radiation-sensitive composition.
REFERENCES:
patent: 4650745 (1987-03-01), Eilbeck
patent: 4738915 (1988-04-01), Komine et al.
Bowers Jr. Charles L.
OCG Microelectronic Materials Inc.
Simons William A.
Young Christopher G.
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