Positioning device for scanning probe microscopes

Details Positioning device for scanning probe microscopes Positioning device for scanning probe microscopes

1992-09-21

1994-04-26

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

310328, H01J 3720

Patent

active

053069196

ABSTRACT:
A two dimensional piezoelectric positioning device of the type including a thin walled cylindrical shaped member of piezoelectric material. A plurality of substantially rectangular shaped members are positioned around one surface of the cylindrical shaped member to form opposite pairs of electrodes to control the two dimensional movement in accordance with voltages applied to the pairs of electrodes. Each rectangular shaped member is split into at least two electrode portions and with particular polarity voltages applied to the individual electrode portions to maintain a substantially constant length for the cylindrical shaped member during the two dimensional movement.

REFERENCES:
patent: 3899728 (1975-08-01), Hoppe
patent: 4520570 (1985-06-01), Bednorz et al.
patent: 4871938 (1989-10-01), Elings et al.
patent: 5198715 (1993-03-01), Elings et al.

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