Positioning device and method of initializing a positioning...

Details Positioning device and method of initializing a positioning... Positioning device and method of initializing a positioning...

2008-05-20

2008-05-20

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C355S072000, C074S490090

Reexamination Certificate

active

07375346

ABSTRACT:
In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.

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patent: 7030964 (2006-04-01), Akutsu et al.
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patent: 2006/0028310 (2006-02-01), Asano et al.
patent: 5-64487 (1993-03-01), None
patent: 11-316607 (1999-11-01), None

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