Data processing: measuring – calibrating – or testing – Measurement system – Measured signal processing
Reexamination Certificate
2006-07-26
2009-12-29
Bui, Bryan (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Measured signal processing
C702S095000, C702S195000
Reexamination Certificate
active
07640142
ABSTRACT:
A position measurement apparatus includes a movable stage structure, a measurement unit using a laser to measure a moved position of the stage and to output a corresponding measured value, a first filter configured to attenuate a first component of a certain frequency region of the measured value outputted by the measurement unit, a second filter connected in parallel with the first filter configured to attenuate a second component other than the certain frequency region of the measured value outputted by the measurement unit, a third filter connected in series to the second filter with the series connection of the second and third filters connected in parallel with the first filter, configured to attenuate the first component of the certain frequency region of the measured value outputted by the measurement unit, and a processing unit configured to combine an output of the first filter and an output of the series connection of the second and third filters and to thereby output a first combined value.
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Hattori Kiyoshi
Mita Makoto
Nakaso Kiyoshi
Okuya Tsugiyuki
Tachikawa Yuichi
Bui Bryan
Moffat Jonathan Teixeira
NuFlare Technology, Inc.
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
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