Polymer having antireflective properties and high carbon...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface

Reexamination Certificate

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Details

C430S271100, C430S313000, C430S449000, C528S205000, C528S425000, C438S952000

Reexamination Certificate

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07862990

ABSTRACT:
An antireflective hardmask composition includes an organic solvent, an initiator, and at least one polymer represented by Formulae A, B, or C as set forth in the specification.

REFERENCES:
patent: 2004/0259037 (2004-12-01), Hatakeyama et al.
patent: 2006/0019195 (2006-01-01), Hatakeyama et al.
patent: 2006/0204891 (2006-09-01), Hatakeyama
patent: 2006/0234158 (2006-10-01), Hatakeyama
patent: 2006/0251990 (2006-11-01), Uh et al.
patent: 2008/0160460 (2008-07-01), Yoon et al.
patent: 2009/0098486 (2009-04-01), Yoshimura et al.
patent: WO 2007/105776 (2007-09-01), None

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