Polishing pad with window having multiple portions

Details Polishing pad with window having multiple portions Polishing pad with window having multiple portions

2011-05-17

2011-05-17

Rose, Robert (Department: 3727)

Abrading

Precision device or process - or with condition responsive...

By optical sensor

C451S041000

Reexamination Certificate

active

07942724

ABSTRACT:
A polishing pad has an opaque polishing layer with an aperture therethrough and a polishing surface, and a solid light-transmissive window in the aperture. The solid light-transmissive window includes an outer portion secured to the polishing layer and an inner portion secured to the outer portion. The outer portion has a upper surface recessed relative to the polishing surface, whereas the inner portion has an upper surface that is substantially co-planar with the polishing surface.

REFERENCES:
patent: 5893796 (1999-04-01), Birang et al.
patent: 6045439 (2000-04-01), Birang et al.
patent: 6068539 (2000-05-01), Bajaj et al.
patent: 6454630 (2002-09-01), Tolles
patent: 6458014 (2002-10-01), Ihsikawa et al.
patent: 6832949 (2004-12-01), Konno et al.
patent: 6855034 (2005-02-01), Hasegawa
patent: 7264536 (2007-09-01), Wiswesser et al.
patent: 2005/0090187 (2005-04-01), Shih et al.
patent: 2006/0128271 (2006-06-01), Shiho et al.
Applied Materials, Inc., International Search Report and Written Opinion of the Corresponding PCT Application No. PCT/US2007/072690 dated Aug. 22, 2008, 9 pages.

Affiliated with

Also associated with

Rating

Polishing pad with window having multiple portions does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Polishing pad with window having multiple portions, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polishing pad with window having multiple portions will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2691188