Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate
2005-04-26
2005-04-26
Wilson, Lee D. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
With indicating
C451S006000, C451S526000, C451S041000
Reexamination Certificate
active
06884150
ABSTRACT:
A polishing pad having an optical assembly that does not cause excess wear on a wafer workpiece. The optical assembly is disposed within the pad such that it may move in response to forces applied to the optical assembly. A damping pad may be disposed on the optical assembly to reduce vibrations and further increase the sensitivity of optical measurements.
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Crockett & Crockett
Crockett, Esq. K. David
Fay III, Esq. Theodore D.
Strasbaugh
Wilson Lee D.
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