4. Abrading
  5. Precision device or process - or with condition responsive...
  6. By optical sensor

Greg Barbour

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In situ feature height measurement

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Polishing pad sensor assembly with a damping pad

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Polishing pad with optical sensor

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2716980

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