4. Abrading
  5. Machine
  6. Rotary tool

Shou-sung Chang

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Apparatus and methods for conditioning a polishing pad

Abrading – Abrading process – With tool treating or forming
Reexamination Certificate

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Conditioner assembly and a conditioner back support for a...

Abrading – Machine – Combined
Reexamination Certificate

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Conditioner assembly for a chemical mechanical polishing apparat

Abrading – Abrading process – With tool treating or forming
Patent

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Pad assembly for electrochemical mechanical processing

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Polishing head for a chemical mechanical polishing apparatus

Abrading – Machine – Rotary tool
Patent

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Profile ID: LFUS-PAI-P-384323

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