Polishing apparatus with grooved subpad

Details Polishing apparatus with grooved subpad Polishing apparatus with grooved subpad

2007-02-15

2009-10-13

Rose, Robert (Department: 3727)

Abrading

Abrading process

Glass or stone abrading

C451S288000, C451S533000

Reexamination Certificate

active

07601050

ABSTRACT:
A polishing apparatus is described. The polishing apparatus includes a rotatable platen, a drive mechanism to incrementally advance a polishing sheet having a polishing surface in a linear direction across the platen, a subpad on the platen to support the polishing sheet, the subpad having a groove formed therein, and a vacuum source connected to the groove of the subpad and configured to apply a vacuum sufficient to pull portions of the polishing sheet into the groove of the subpad to induce a groove in the polishing surface.

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