Abrading – Precision device or process - or with condition responsive... – With indicating
Patent
1996-09-06
1999-01-19
Morgan, Eileen P.
Abrading
Precision device or process - or with condition responsive...
With indicating
451 41, 451285, 451287, H01L 2166, B24B 4900
Patent
active
058608478
ABSTRACT:
A polishing apparatus has a turntable with an abrasive cloth mounted on an upper surface thereof and a top ring disposed above the turntable for supporting a workpiece to be polished against the abrasive cloth under predetermined pressure. The turntable is rotatable by a first motor through a timing pulley connected to the first motor, and the top ring is rotatable by a second motor through a timing pulley connected to the second motor. A torque detector incorporated in the timing pulley connected to at least one of the first motor and the second motor detects an output torque produced by the at least one of the first motor and the second motor.
REFERENCES:
patent: 4724711 (1988-02-01), Sakakibara et al.
patent: 5036015 (1991-07-01), Sandhu et al.
patent: 5069002 (1991-12-01), Sandhu et al.
patent: 5445996 (1995-08-01), Kodera et al.
patent: 5639388 (1997-06-01), Kimura et al.
Katsuoka Seiji
Kodera Masako
Nishi Toyomi
Sakurai Kunihiko
Togawa Tetsuji
Ebara Corporation
Kabushiki Kaisha Toshiba
Morgan Eileen P.
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