Point-of-use vaporization system and method

Details Point-of-use vaporization system and method Point-of-use vaporization system and method

1998-04-23

2000-02-08

Nakarani, D. S.

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118715, 261142, C23C 1600

Patent

active

060224169

ABSTRACT:
A point-of-use vaporization system for use in Chemical Vapor Deposition having a first delivery member for delivering a liquid precursor to a vaporization point, a second delivery member for separately delivering a solvent to the vaporization point, and a frit for vaporizing the precursor and solvent at the vaporization point.

REFERENCES:
patent: 5312509 (1994-05-01), Eschbach
patent: 5362328 (1994-11-01), Gardiner et al.
patent: 5776254 (1998-07-01), Yuuki et al.

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