Point of use slurry dispensing system

Details Point of use slurry dispensing system Point of use slurry dispensing system

1994-12-16

1995-12-26

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566391, 156345, H01L 7100

Patent

active

054784352

ABSTRACT:
A point of use slurry dispensing system with controls for dilution, temperature and oxidizer/etchant/additive infusion. A slurry in unmixed form and a diluting agent are independently pumped to a pad on a CMP tool. Liquid heaters are used to heat the slurry and the diluting agent to a desirable temperature. The actual mixing occurs at the point of use on the pad or in a dispensing line just prior to the point of use. In some instances a third independent distribution line is used to dispense an oxidizer, etchant and/or chemical additive at or near the point of use.

REFERENCES:
patent: 3979239 (1976-09-01), Walsh
patent: 4021278 (1977-05-01), Hood et al.

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