Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
Patent
1981-09-24
1986-01-14
Rosenberger, R. A.
Optics: measuring and testing
By configuration comparison
With photosensitive film or plate
250201, G01B 1106
Patent
active
045642966
ABSTRACT:
A plate thickness measuring method and apparatus, is provided wherein a fine pattern is projected on the front and rear surfaces of an object to be measured via object lenses oppositely provided on the front and rear surfaces of the object to be measured in its thickness. The image of the projected pattern on the object to be measured is formed via said object lenses, and the contrast of the formed pattern image is detected. Then the object lenses are moved slightly to achieve the maximum of the contrast, or to perform an automatic focusing control. The thickness of the object to be measured can then be estimated from the difference of the positions of the object lenses at which the maximum contrast, or the focused condition, are obtained.
REFERENCES:
patent: 2351770 (1944-06-01), Koenig
patent: 3019708 (1962-02-01), French et al.
patent: 3606541 (1971-09-01), Sugano et al.
patent: 3804523 (1974-04-01), McCormack
patent: 4359282 (1982-11-01), Garrison
Aoki Nobuhiko
Makihara Hiroshi
Oshida Yoshitada
Hitachi , Ltd.
Rosenberger R. A.
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