Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1994-07-11
1995-04-04
Padgett, Marianne
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156646, 156662, 156664, 156668, 427534, 427539, 427536, B05D 306, H01L 21306
Patent
active
054034361
ABSTRACT:
A plasma treating method subjects an object surface to a plasma treating within a chamber. First, first and second gasses are supplied into the chamber, where the first gas includes hydrogen molecules as a main component, the second gas includes a quantity of hydrogen less than that included in the first gas and is selected from a group of materials consisting of organic compounds and inorganic compounds, the organic compounds include hydrogen and oxygen and the inorganic compounds include hydrogen. Second, plasma of a mixed gas which is made up of the first and second gasses is generated within the chamber to subject the object surface to the plasma treating. Preferably, the second gas is water vapor.
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Fujimura Shuzo
Matoba Yuji
Miyanaga Takeshi
Nakano Yoshimasa
Takeuchi Tetsuya
Fujitsu Limited
Padgett Marianne
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