Electric heating – Metal heating – By arc
Reexamination Certificate
2007-05-22
2007-05-22
Paschall, Mark (Department: 3742)
Electric heating
Metal heating
By arc
C219S121430, C219S121520, C118S7230IR, C204S298330, C156S345340
Reexamination Certificate
active
10754280
ABSTRACT:
A gas distribution ceiling electrode for use as a capacitive source power applicator and gas distribution showerhead in a plasma reactor includes a metal base and a process-compatible protective layer on the interior surface of he electrode having a dopant impurity concentration within a range corresponding to a minimal change in RF power absorption in the protective layer at an RF source power frequency with changes in coating temperature and or thickness. The metal base may have a set of first arcuately slotted gas passages and a set of pressure-dropping orifices coinciding axially with the top ends of the gas passages. The protective coating a set of arcuately slotted gas passages in registration gas passages of the metal base. The pressure drop in the orifices and the electric field drop in the slotted gas passages are both sufficient to maintain the pressure and electric field within the gas passages within a range that prevents arcing.
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Hofman Daniel J.
Sun Jennifer Y.
Thach Senh
Ye Yan
Applied Materials Inc.
Paschall Mark
Wallace Robert M.
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