Electric heating – Metal heating – By arc
Reexamination Certificate
2006-11-28
2006-11-28
Paschall, Mark (Department: 3742)
Electric heating
Metal heating
By arc
C219S121410, C219S121400, C156S345440, C156S345470, C118S7230IR
Reexamination Certificate
active
07141757
ABSTRACT:
A plasma reactor operable over a very wide process window of pressure, source power and bias power includes a resonant circuit consisting of an overhead electrode having a first impedance, a wafer support pedestal having a second impedance and a bulk plasma having a third impedance and generally lying in a process zone between the overhead electrode and the wafer support pedestal, the magnitudes of the impedances of the overhead electrode and the wafer support pedestal being within an order of magnitude of one another, the resonant circuit having a resonant frequency determined by the first, second and third impedances.
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U.S. Appl. No. 10/007,367, filed Oct. 22, 2001, entitled, “Merie Plasma Reactor with Overhead RF Electrode Tuned to the Plasma with Arcing Suppression”, by Daniel Hoffman, et al.
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Buchberger, Jr. Douglas A.
Burns Douglas
Hoffman Daniel
Yang Jang Gyoo
Applied Materials Inc.
Paschall Mark
Wallace Robert M.
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