Adhesive bonding and miscellaneous chemical manufacture – Methods – Making electrical conductors of indefinite length
Reexamination Certificate
2011-06-28
2011-06-28
Gramaglia, Maureen (Department: 1716)
Adhesive bonding and miscellaneous chemical manufacture
Methods
Making electrical conductors of indefinite length
C118S7230AN
Reexamination Certificate
active
07967930
ABSTRACT:
A plasma reactor is provided for processing a workpiece such as a transparent mask or a semiconductor wafer. The reactor includes a vacuum chamber having a ceiling and a sidewall. A workpiece support pedestal within the chamber includes a metal cathode having a support surface facing the ceiling and defining a support plane for supporting a workpiece. The cathode has a hollow space formed within its interior. The reactor further includes a movable metal element within the hollow space and a mechanism for controlling a distance between the metal element and the support plane.
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Bivens Darin
Chandrachood Madhavi R.
Grimbergen Michael N.
Kumar Ajay
Lewington Richard
Applied Materials Inc.
Gramaglia Maureen
Wallace Robert M.
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