Plasma processing apparatus with a lisitano coil

Details Plasma processing apparatus with a lisitano coil Plasma processing apparatus with a lisitano coil

1988-04-29

1990-11-27

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511161, 31511171, H01J 724, H05B 3126

Patent

active

049738836

ABSTRACT:
A plasma processing apparatus and method is equipped with a vacuum chamber, helmholtz coils, a microwave generator and gas feeding systems. The microwave generator consists of a lisitano coil which is capable of emitting a microwave in the TE.sub.011 mode. In the light of such a microwave, a high quality film can be deposited.

REFERENCES:
patent: 4166760 (1979-09-01), Fowler et al.
patent: 4293794 (1981-10-01), Kapetanakos
patent: 4438368 (1984-03-01), Abe et al.
patent: 4481229 (1984-11-01), Suzuki et al.
patent: 4713585 (1987-12-01), Ohno et al.
patent: 4745337 (1988-05-01), Pichot et al.
patent: 4778561 (1988-10-01), Ghahbari
patent: 4806829 (1989-02-01), Nakao

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