Plasma processing apparatus

Details Plasma processing apparatus Plasma processing apparatus

2005-03-15

2005-03-15

Hassanzadeh, Parvis (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

C156S345420, C118S7230MW, C118S7230MR, C118S7230AN

Reexamination Certificate

active

06866747

ABSTRACT:
On one side of a microwave entrance window that is exposed to the atmosphere, a slot plate having slots and a resonant unit are provided. The slot plate and the resonant unit are integrally placed to be slidable by linear guides with respect to a process chamber. In this way, a plasma processing apparatus can be provided that performs a highly uniform plasma process and is excellent in terms of plasma generation property.

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