Plasma deposited selective wetting material

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface

Reexamination Certificate

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C430S005000

Reexamination Certificate

active

07026102

ABSTRACT:
A selective wetting material is formed by plasma depositing a film on a substrate from a two-component reaction of a silicon donor and organic precursor, and photo-oxidizing selected regions of the deposited film to form wetting regions to which a liquid will selectively adhere. When the liquid is an electrically conductive material, the process may be used to form printed circuits on a circuit board. When the substrate is optically transparent and the non-photo-oxidized regions of the film are removed, the process may be used to form a photomask.

REFERENCES:
patent: 4532150 (1985-07-01), Endo et al.
patent: 4921321 (1990-05-01), Weidman
patent: 5500250 (1996-03-01), Ogawa et al.

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