Planar inertial sensor, in particular for portable devices...

Details Planar inertial sensor, in particular for portable devices... Planar inertial sensor, in particular for portable devices...

2007-08-07

2007-08-07

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

10948095

ABSTRACT:
A planar inertial sensor includes a first region and a second region of semiconductor material. The second region is capacitively coupled, and mobile with respect to the first region. The second region extends in a plane and has second portions, which face respective first portions of the first region. Movement of the second region, relative to the first region, in any direction belonging to the plane modifies the distance between the second portions and the first portions, which in turn modifies a value of the capacitive coupling.

REFERENCES:
patent: 5025346 (1991-06-01), Tang et al.
patent: 5528937 (1996-06-01), Dufour
patent: 5864064 (1999-01-01), Kano et al.
patent: 5955668 (1999-09-01), Hsu et al.
patent: 0 833 537 (1998-04-01), None
patent: 2000-304766 (2000-11-01), None

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