Placement tool for wafer scale caps

Details Placement tool for wafer scale caps Placement tool for wafer scale caps

2007-02-06

2007-02-06

Whitehead, Jr., Carl (Department: 2813)

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

Entirely of metal except for feedthrough

C438S053000, C438S106000

Reexamination Certificate

active

10728985

ABSTRACT:
A tool is used to hold an array of wafer scale protective caps and place the array onto a semiconductor wafer. The tool comprises a first tool half made from a semiconductor which has a coefficient of thermal expansion which is about the same as that of the wafer. The first tool half has surface features for molding and retaining the array. The caps have central areas surrounded by sidewalls.

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