Piezoresistive cantilever with integral tip for scanning probe m

Details Piezoresistive cantilever with integral tip for scanning probe m Piezoresistive cantilever with integral tip for scanning probe m

1993-06-03

1995-08-22

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

H01J 3700

Patent

active

054442443

ABSTRACT:
A cantilever for a scanning probe microscope is disclosed. The cantilever includes a piezoresistor for detecting the deflection of the cantilever, and a tip which is formed integrally with the cantilever. A process of fabricating such a cantilever is also disclosed, the process yielding a tip which has a high aspect ratio and a small radius of curvature at its apex. A combined atomic force/lateral force microscope including two or more piezoresistors responsive to both the bending and torsion of the cantilever is also disclosed.

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