Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1997-07-17
1999-02-02
Hamilton, Cynthia
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430326, 430330, G03F 730, G03F 740
Patent
active
058663045
ABSTRACT:
The invention provides a photosensitive resin which includes polymer including a group which reacts with an acid to thereby convert a polarity thereof, a photo acid generator which is responsive to radial rays to thereby generate an acid, and a solvent in which the polymer and the photo acid generator is soluble. The polymer is a terpolymer represented by a following general formula (I) wherein n represents a positive integer ranging from 5 to 1000 both inclusive, R.sup.4 is a group selected from a group consisting of a tricyclodecanyl group, a dicydopentenyl group, a dicyclopentenyloxyethyl group, a cyclohexyl group, a norbonyl group, a norbornaneepoxy group, a norbornaneepoxymethyl group and an adamantyl group, R.sup.5 is a group selected from a group consisting of a tetrahydropyranyl group, a tetrahydrofuranyl group, a methyl group, an ethyl group, a propyl group, a tert-butyl group and 3-oxocyclohexyl group, and x+y+z=1 in which x is a variable in the range from 0.1 to 0.9 both inclusive, y is a variable in the range from 0.1 to 0.7 both inclusive, and z is a variable in the range from 0.01 to 0.7 both inclusive. ##STR1##
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Hasegawa Etsuo
Iwasa Shigeyuki
Nakano Kaichiro
Hamilton Cynthia
NEC Corporation
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