Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2005-11-15
2005-11-15
Thornton, Yvette C. (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S326000, C430S905000, C430S910000, C525S337000
Reexamination Certificate
active
06964839
ABSTRACT:
A photosensitive copolymer has a weight-average molecular weight of 3,000 to 100,000 and is represented by the following formula:wherein R1is a hydrogen atom or methyl, R2is an acid-labile tertiary alkyl group, and m/(m+n) is 0.5 to 0.8.
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Definition of copolymer The American Heritage Dictionary of the English Language, Third Edition copyright 1992 by Houghton Mifflin Company.
R.D. Allen et al., “Cyclic Olefin Resist Polymers and Polymerizations for Improved Etch Resistance,” Journal of Photopolymer Science and Technology, vol. 12, No. 3 (1999), pp. 501-507.
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Choi Sang-jun
Kim Hyun-woo
Moon Joo-tae
Woo Sang-gyun
Samsung Electronics Co,. Ltd.
Thornton Yvette C.
Volentine Francos & Whitt PLLC
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