Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1992-03-13
1993-04-27
McCamish, Marion E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430270, 430330, 430906, 430908, 430919, G03F 732, G03F 7038
Patent
active
052061175
ABSTRACT:
The present invention relates to photosensitive negative and positive tone compositions for imagewise deposition of polyimide on a substrate.
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Labadie Jeffrey W.
McKean Dennis R.
Volksen Willi
Wallraff Gregory M.
Dote Janis L.
Martin Robert B.
McCamish Marion E.
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