Photosensitive composition and use thereof

Details Photosensitive composition and use thereof Photosensitive composition and use thereof

1994-11-25

1995-11-07

Rodee, Christopher D.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430330, G03F 738

Patent

active

054647266

ABSTRACT:
A photosensitive composition containing a curable cyanate ester and a cationic photoinitiator; and use thereof to form a resist image.

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