Photoresist composition and method of forming a pattern...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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Details

C430S322000, C430S323000, C430S325000, C430S914000, C430S927000, C430S904000, C430S905000

Reexamination Certificate

active

07419759

ABSTRACT:
The photoresist composition of the present invention includes a solvent mixture, a resin, a photo acid generator, and a quencher, the solvent mixture comprising a first solvent containing an ether compound and a second solvent having a polarity stronger than the first solvent, wherein an amount of the first solvent is in a range of about 61% to about 79% by weight, and an amount of the second solvent is in a range of about 21% to about 39% by weight based on a total weight of the solvent mixture.

REFERENCES:
patent: 6479211 (2002-11-01), Sato et al.
patent: 7235342 (2007-06-01), Li et al.
patent: 06-324488 (1994-11-01), None
patent: 11-202479 (1999-07-01), None
patent: 1995-012148 (1995-05-01), None
patent: WO 01/95034 (2001-12-01), None

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