Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2005-12-27
2005-12-27
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S306000
Reexamination Certificate
active
06979819
ABSTRACT:
A method of inspecting and imaging substrates with an electron beam. The method can include a illuminating the substrate with a photon beam to cause photoemission of electrons. A low energy electron beam can be used to prevent or reduce positive charging of the substrate. Reflected electrons and/or emitted photoelectrons can be imaged to review or inspect the substrate.
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Adler David
Marcus Matthew
Johnston Phillip A
KLA-Tencor Technologies Corporation
Lee John R.
Okamoto & Benedicto LLP
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